Contact us for price and availability: cliff_zeng@msn.com

SRENI SEMI TECHNOLGOY SERVICE CO.

We buy repair and sell RF/DC generators and related equipments.

used equipment

We provide used/refurbished /overhauled RF/DC generators, all come with warranty.

​Looking for generators or repair service?

Send me a message: cliff_zeng@msn.com or give us a call at +86 1866 5995 963  We are here for all your generator needs.

WeChat: SRENI2013


repair service

We repair RF/DC generator at component level, you get the most cost effective solution from us!

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AVAILABLE genrators in stock,  UPDATED IN oct. 2024

  1. RFDS1250 660-024637-026, 3155059-026
  2. RFDS1250 660-024637-016, 3155059-002
  3. RFDS-A 660-024637-000, 3155059-001J
  4. RFDS1250-A 660-024637-004, 3155059-000D 
  5. RFG1250 HALO 660-024637-028, 3155027-028
  6. RFG1251 660-024637-200, 3155107-102
  7. RFG1251,3155107-001
  8. RFG1251 R27-156759-00, 3155107-101
  9. RFG2000-2V 3155053-007
  10. RFG3000 3155038-004B
  11.  RFG3000 3155038-005B ;27-034121-00,2.75KW HF GEN
  12.  RFG3001 3155089-005
  13.  RFG3001 3155089-004
  14.  RFG3002 3155089-010, AXCELIS PN190000552
  15.  RFG5500 3155051-013(25PIN)(SOLD)
  16.  RFG5500 3155051-015(15PIN) PN: R27-115617-00
  17.  RFG5500 3155051-011(25PIN) 660-098719-001(SOLD)
  18. PDX5000;27-113711-00;3156034-104;3156034-204;
  19. PDX-5000 3156043-207
  20. AE PDX8000 3156048-201 F47 MF GEN, 27-278207-0
  21. RFX II 5500;3155066-001
  22. RFXII 3000, 3155047-005
  23. ​RFX1250,
  24. RFX-600A 
  25. RFX-600, 3155002-005,3155002-001
  26. mdx-l12, 0190-76191; MN: 3152344-100d; 3152313-014;
  27. mdx-l6, 2280-000-D;0190-700
  28. PARAMOUNT 3013 PN: 660-078399-205-C MN:3156330-160 PULSE  1EA
  29. PARAMOUNT 3013 PN: 660-078399-206-A MN:3156330-165  3EA
  30. AE PARAMOUNT 3013 PN:660-243024-905; MN: 3156330-265 1EA
  31. AE PARAMOUNT 3013  (MN: 3156330-165, 660-078399-206-A); (3156330-017, 1EA;3156330-021; PN: 660-153256-001) (660-176886-072, 3156330-072, 1EA)
  32. CESAR 1310
  33. AE MDX-20K MASTER 3142223-003
  34. AE MDX-L12M 3152313-014B
  35. AE HFV 8000, 3155083-002 AE ASIS FOR PARTS (SOLD)
  36. AE PARAMOUNT 3013 PN:660-078399-206; (MN: 3156330-165, 660-078399-206-A); (3156330-017;3156330-021; PN: 660-153256-001) (660-176886-072, 3156330-072)
  37. AE APEX3013 PN: 0920-00059; A3D5L000BA140A121A;
  38. AE APEX3013 MN: 3156114-006;3156114-746;0190-53914 SPT match plate
  39. AE APEX 3013 PN: 0190-19021-001;,MN: 3156113-006 (VFP CLT)
  40. AE APEX 1513 PN: 660-032596R213; 3156110-213
  41. AE APEX 1513 PN: 660-032596-013; 3156110-013
  42. AE APEX 1513 PN: 660-032596-014; 660-032596-214;3156110-214;3156110-014;3156110-714;
  43. AE APEX 5513 PN: 3156115-251; 3156115-651;3156115-253;3156115-003;3156115-203;3156115-201;0190-16198-05,3156115-002;0190-64240-05,3156115-745;
  44. AE APEX10KW/13 PN: A3H2C200KA130G001A APEX10013
  45. ​AE MATCH (1110-00056-000,3155031-037,-043);3155031-104; 3155031-038, 0190-14783;0190-01371 3355031-020A;3155031-036, 0190-11225;
  46. 0010-07741,0010-13524 SIDE LOCAL MATCH ASSEMBLY;
  47. 0100-40033 E-CHUCK PWR SUPPLY 0100-40034
  48. VM1000A, 69000043 1000W 13.56MHZ 
  49. MW-2502-00; 0190-11570
  50. PDX 900-2V, 0190-75095-003, MN:3156024-131;3156024-132;3156024-130;
  51. PDX 1250 (SOLD)
  52. PDX1400 (SOLD)
  53. ​OB1 ENI OB1-R02(M), 660-099877-005
  54. OB1 ENI 0B1-01 660-099877-002 
  55. OB1 LAM OB1-R03 660-099877R101 
  56. 000-1134-077;660-099877-502 27MHZ
  57. 000-1134-077R; 660-099877R502  27MHZ 
  58. 000-1134-076R; 660-099877R402 2MHZ
  59. MKS ENI DOFBC2-083 27MHZ GENERATOR(-104) ENI PN: 000-9286-083 CUST PN: 660-002294-104
  60. MKS ENI DOFBC2-083 PN: 000-1103-083, 660-002294-002
  61. MKS-ENI-DOFBC2-083 2MHz-GENERATOR 000-1103-084
  62. ENI MKS DOFBC2-084 660-002295-002 
  63. ENI MKS DOFBC2-075
  64. ENI GHW12Z-13df2nh-001; 0190-49002
  65. ENI GHW12Z-13DF2NH-002, 0190-49003
  66. ENI GHW12A-07117, 0195-04467
  67. ENI GHW12A-13DF2NO-001;0190-25531
  68. ENI GHW25A-15018(sold)
  69. ENI GHW-25A 0190-48618 (sold)
  70. ENI GHW25a-13DF3NO-001 GHW-25A GHW25a-13DF3NO-001 (sold)
  71. MKS ENI GHW50A-13DF3H0-003 GHW50A GHW50A-13DF3H0-10, 0190-03225
  72. GHW-85A; GHW85A-13DF2L0-001;27-274809-00
  73.  MKS ENI NOVA-50a-04 NOVA50 NOVA-50a-10; 0190-25116R; 0190-15316R 
  74. ENI OEM12A
  75. ENI OEM6B
  76. ENI OEM12B3-08 ;0920-01061 
  77. ENI OEM12B3-02; 0190-76028
  78. ENI OEM12B-02,0190-70080
  79. ENI OEM12B-07,0190-76048
  80. ENI OEM28B-02(SOLD, REPLACE MODEL AVAILABLE)
  81. ENI GMW25A-2DOF3NO-003 GMW-25A, 190-16551 
  82. ENI GW2502MA-B1C001-L2 GMW-25 660-110685-002 
  83. ENIACG-6B-02, ACG6B, 0920-01117
  84. ENIACG-6B-06 ACG6B 
  85. ENIACG-6B-07 ACG6B 
  86. ENIACG-6B-01 ACG6B 
  87. ENI ACG-3B-01 ACG3B
  88. ENI ACG10B-01,02, 03 
  89. OPTIMA DCG-200Z;PN: OPT-100Z-08174;0190-32405/01
  90. MKS ENI SUREPOWER QL3513 PN: QL3513A-0F05; QL3513-07091
  91. mks ENI SUREPOWER QL6513 PN:QL6513Z-14005, 6500W, 13.56MHZ 
  92. MKS LMF5002A, PN: LMF5002A-10B-05, 660-072823-200
  93. COMDEL CPS-1001/13
  94. COMDEL CPS-1001S 0190-70099 P/N: FP0213RK
  95. AE RFPP LF10A, 7520426011, MN 3150010-001, AMAT P/N 0190-70100, 1000W, 208VAC
  96. RFPP LF-5SWC 7520572050,500W 50-460 Khz
  97. 0010-4130-03 BROOKS AUTOMATION
  98. ESY-LYA2AFH-20 ESA NSK Y DELIVER 8INCH IRA S  2980-194829-11T
  99. Adtec AX-3000 III RF Plasma Generator, Novellus 27-176875-00, 13.56Mhz
  100. ENI MWH-5-01M10 MATCH
  101. POLARA-260A ENI POLARA-260-01 Bipolar Pulsed Supply Rev. B AMAT 0190-01428
  102. Atlas 2012 AE Advanced Energy 3150262-000, 0920-01116
  103. RFG3000 Eaton P/N 1907630 REV G, AE P/N 3155038-001A
  104. 000-1108-1,BH6-61/ BH6-60 WATER CONNECTOR FAST LOCK 
  105. ENI 0190-36342 (DPGS-10-CE) dpg-10
  106. BIRD 4421 METER; 4024;4027A2M,4027A10M,4025 SENSOR
  107. ENI QUANTA-10D-01 ,0190-36518, 900W PER CHANNEL
  108. ADVANCED ENERGY AE APEX3013, 3156114-746, 3KW RF GENERATOR(SOLD)
  109. ADVANCED ENERGY AE APEX3013, 3156114-006, 3KW RF GENERATOR
  110. ADVANCED ENERGY AE APEX3013, 3156113-006, 3KW RF GENERATOR, 0190-19021-001
  111. ADVANCED ENERGY AE APEX5513, 3156115-002 P/N: 0190-16198-005, 5.5KW RF GENERATOR
  112. ADVANCED ENERGY AE APEX5513 3156115-745, P/N: 0190-64240-05, 5.5KW RF GENERATOR(sod)
  113. ENI DCG-200A  PART NO.: DC22S-A022000011MA, SLAE for DC22M-A001100010MA
  114. RF20R RFPP, 0920-01048, 7522354011,2000W, 12.56MHZ
  115. RF20S RFPP, 2000W, 13.56MHZ
  116. COMET MATCH, 27-382473-00;5000W, 13.56MHz;
  117. COMDEL CDX-2000 DURA RF GENERATOR 0190-76030 P/N: FP5315RF 208V
  118. COMDEL CDX-2000 DURA RF GENERATOR 0190-406555 P/N: FP5325R1 4440/480 VAC(sold)
  119. AE APEX 1513 PN: 660-032596R218; 3156110-218
  120. AE APEX 1513 PN:660-032596-514; PIN: 3156110-714 
  121. GMW-25Z , GMW25Z-2DOF2NT-001; 2500W, 2.00MHZ, 0190-50927;
  122. GLASSMAN HIGH VOLTAGE, PS/EX200P008B HV STACK 200KV 8MA VARIAN E11005671
  123. AE MATCH 3155031-043; 3155031-045
  124. APEX-10KW/13 RF GENERATOR A3H0C00BA120G001A
  125. AE HFV 8000, 0190-13203; 3155083-002 ;11KW 
  126. TRAZAR AMU2-1 match 27-121645-00 for NOVELLUS C1
  127. HiTek Power OL8000/104/32 A1029120 POWER SUPPLY
  128. apex1513, 3156110-714, 660-032596-514
  129. ENI SPECTRUM 11002-00, 11000W 1.8-2.17MHz